GAS DISTRIBUTION ASSEMBLY HAVING EXTENDED GAS DISTRIBUTION PLATE AND CHEMICAL VAPOR DEPOSITION APPARATUS

摘要

A gas distribution assembly having an extended gas distribution plate and a chemical vapor deposition apparatus are provided. The present invention includes a back plate; a gas distribution plate which is located in a lower part of the back plate and has multiple spray holes; and a support member for supporting the gas distribution plate by being connected to the back plate, wherein the gas distribution plate includes four sides and an extension unit which is outwardly extended at a corner unit formed in between the four sides. According to the present invention, a deposition layer with uniform thickness can be formed over the entire surface for a large scale substrate.;COPYRIGHT KIPO 2014