首页> 外国专利> METAL MASK HAVING A RESIN PLATE, VAPOR DEPOSITION MASK, METHOD FOR PRODUCING VAPOR DEPOSITION MASK DEVICE, AND METHOD FOR PRODUCING ORGANIC SEMICONDUCTOR ELEMENT

METAL MASK HAVING A RESIN PLATE, VAPOR DEPOSITION MASK, METHOD FOR PRODUCING VAPOR DEPOSITION MASK DEVICE, AND METHOD FOR PRODUCING ORGANIC SEMICONDUCTOR ELEMENT

机译:具有树脂板的金属掩膜,气相沉积掩膜,气相沉积掩膜装置的制造方法以及有机半导体元件的制造方法

摘要

A method for producing a vapor deposition mask capable of satisfying both enhancement in definition and reduction in weight even when a size is increased, a method for producing a vapor deposition mask device capable of aligning the vapor deposition mask to a frame with high precision, and a method for producing an organic semiconductor element capable of producing an organic semiconductor element with high definition are provided. A metal mask provided with a slit, and a resin mask that is positioned on a front surface of the metal mask and has openings corresponding to a pattern to be produced by vapor deposition arranged by lengthwise and crosswise in a plurality of rows, are stacked.
机译:即使在增加尺寸的情况下,也能够同时满足清晰度的提高和重量的降低的蒸镀掩模的制造方法,能够使蒸镀掩模与框体高精度地对位的蒸镀掩模装置的制造方法,以及制造方法。本发明提供一种能够制造高精细的有机半导体元件的有机半导体元件的制造方法。堆叠具有狭缝的金属掩模和位于金属掩模的前表面上并具有与通过汽相沉积而产生的图案相对应的开口的树脂掩模,该图案通过纵向和横向布置成多行。

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