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transition metal dichalcogenides device formed by re-crystallization and transistor device using the same
transition metal dichalcogenides device formed by re-crystallization and transistor device using the same
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机译:通过重结晶形成的过渡金属二卤化物器件和使用该器件的晶体管器件
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摘要
The present invention relates to a transition metal dichalcogenides device formed by re-crystallization and a transistor device using the same. The present invention is to form single and poly crystals by performing a laser annealing process on amorphous transition metal dichalcogenides formed by a deposition process. For this, a semiconductor channel material is formed by recrystallizing the single and poly crystalline transition metal dichalcogenides by annealing the amorphous transition metal dichalcogenides obtained by the deposition process. [Reference numerals] (AA) After/before laser annealing Vgs_ld
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