Hot-wire type semiconductor gas sensor, the manufacturing method thereof and a gas detector having the hot-wire type semiconductor gas sensor

摘要

Hot-wire type semiconductor gas sensor according to the present invention comprises; a sensing part (10) with sensing part poles (11) installed by being connected respectively to a sensing device (12) operated in a condition heated to 350~450 and to both ends of the sensing device (12); and a compensating part (20) with compensating poles (21) installed by being connected respectively to a compensating device (22) consisting of a resistor and to both sides of the compensating device (22); and a support part (4) made of a synthetic resin and installed by piercing through of the sensing part poles (11) and the compensating part poles (21); and a blocking part (30) to mutually separate the sensing device (12) and the compensating device (22) by being installed in the upper part between the sensing part (10) and the compensating part (20); and a mesh cover (3) protecting the sensing part (10) and the compensating part (20) by being combined with the upper part of the support part (4), while the sensing device (12) comprises; a platinum wire (13) with the both ends fixed respectively to the sensing part poles (11); and a platinum coil heat generating part (13a) formed with a part of the platinum wire (13) being wound in a coil form ; and a semiconductor metal oxide (14) coating the platinum coil heat generating part (13a) by sintering after being adhered to the platinum coil heat generating part (13a). Gas sensor of the present invention has advantages of having a high sensitivity to combustible gases and volatile organic compounds, a high output value at low concentrations, an excellent reproducibility and response speed accompanied by a long lifetime.