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METHODS OF FORMING LAYERS OF SEMICONDUCTOR MATERIAL HAVING REDUCED LATTICE STRAIN, SEMICONDUCTOR STRUCTURES, DEVICES AND ENGINEERED SUBSTRATES INCLUDING SAME
METHODS OF FORMING LAYERS OF SEMICONDUCTOR MATERIAL HAVING REDUCED LATTICE STRAIN, SEMICONDUCTOR STRUCTURES, DEVICES AND ENGINEERED SUBSTRATES INCLUDING SAME
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机译:具有减少的晶格应变,半导体结构,器件和工程化的基体(包括相同的结构)的半导体材料形成层的方法
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摘要
steps of a method for fabricating semiconductor devices or structures forming the flexible material layer overlying the semiconductor material structure and then a step of utilizing a semiconductor material comprising changing the viscosity of the dielectric material so as to relax the structure , and subsequent relaxation the relaxed semiconductor material layer to form a semiconductor structure with a seed layer material . In some embodiments, the semiconductor material layer may include, for example, a III-V semiconductor material such as indium gallium nitride . New intermediate structure are formed in this way in the middle . Processed substrates are semiconductor material comprises a continuous layer having a relaxed lattice structure . ;
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