METHOD FOR MANUFACTURING (INDIUM, GALLIUM, ZINC, OXIDE TARGET AND INDIUM, GALLIUM, ZINC, OXIDE TARGET BY USING THE SAME

摘要

The present invention relates to the production process as the target and more particularly, indium (In ₂ O ₃ ) powder, gallium oxide (Ga ₂ O ₃ ) powder , and zinc oxide (ZnO) powder and a dispersing agent is prepared by mixing about IGZO target distribution of the target production process , and whereby each IGZO . To this end, the present invention is an indium (In ₂ O ₃ ) powder and gallium oxide (Ga ₂ O ₃ ) powder , and zinc oxide (ZnO) powder and a dispersing agent by mixing each dispersion of dispersing process , and each of the decentralized and the indium oxide powder, gallium oxide powder and zinc oxide powder by mixing and sintering a formed article after manufacture including the sintering process . ;