A process for the correction of a measured value of a machine for measuring the surface structure and machine for measuring the surface structure

摘要

A process for the correction of a measured value for a machine for the measurement of the surface structure, wherein the machine comprises: a stand (d), the upright on a base (a) of the machine; a vertically movable table (e), which is mounted in such a way that it is vertically with respect to the stand (d) can be moved; a v-axis detector (13), of a vertical displacement amount of the vertically movable table (e) in relation to the stand (d); a horizontal x-axis guide (17), responsive to the vertically movable table (e) is arranged; a slider (18), which along the x-axis guide (17) is guided, and a z-axis detector (27), which detects a surface structure of an object; and a x-axis detector (74), the one horizontal shift amount x of the slider (18) with respect to the x-axis guide (17) determines said method comprising:an error calculating step calculates, in which as a result of a deformation of the stand error amounts occurring with respect to the x-axis and z-axis at a reference position of the vertically movable table are calculated from a height v of a base portion of the stand to the reference position of the vertically movable table, wherein the height v of the v-axis detector is obtained, and from a horizontal shift amount x from a reference position of the x-axis guide to the position of the centre of gravity (g) of the slider (18), wherein the horizontal shift amount x from the x-axis detector (74) is obtained; andan error correction step uses, in which a measuring result at least one of the x-axis detector or of the z-axis detector is corrected in accordance with the error amount, which is obtained in the case of the error calculating step calculates,the error correction step uses comprises: ..