differential microphone prepared in micromanufacturing

摘要

miniature differential microphone prepared in surface-micro manufacturing, consisting of:a) a substrate (200);b) a on the upper surface of the substrate (200) deposited sacrificial layer (202);c) a on the surface of the sacrificial layer (202) deposited membrane material layer (204);d) of a in the membrane material layer (204) molded membrane (102), the of the remaining part of the membrane material layer (204) by a around the circumference of the membrane (102) extending slot (114); and is separatede) a, into a by removing the sacrificial layer (202) cavity (110) under the membrane (102) enclosed rear air volume (108) with a through the thickness of the sacrificial layer (202) of a defined depth, wherein the rear air volume (108) with a to the region located outside only by way of the slot (114),characterized in that the membrane (102) by a hinge (104) is supported.