Method for separating evaporating material on substrate in evaporator, involves influencing a deposition rate for separating evaporating material on substrate by varying prevailing pressure within vacuum recipient

摘要

The method involves influencing a deposition rate for separating the evaporating material (105) on a substrate (106) by varying the prevailing pressure within the vacuum recipient (100). The separation rate of the evaporating material is influenced by lowering the pressure in the vacuum recipient with respect to the vapor pressure of the evaporating material with the evaporation temperature. The evaporating material is selected from the organic polymer or hexamethyldisiloxane. An independent claim is included for evaporator.