crystal analyzer, composite charge carrier-device and crystal analysis method

摘要

A crystal analyzer comprises: a measurement data memory which is designed to electron backscattering pattern- (ebsp) to store data on electron beam irradiation points at a plurality of cross sections of a sample are measured, the substantially parallel at predetermined intervals; a crystal orientation database are produced, which is designed for this purpose, information relating to collect crystal orientations, which correspond to ebsps; and a figure generation unit, which provides for a three-dimensional crystal orientation mapping on the basis of a distribution of crystal orientations in normal directions of a plurality of surfaces of a polyhedral image with the cross sections arranged in the predetermined intervals, in that the crystal orientations in the normal directions of the areas of the crystal orientation database on the basis of the stored in the measurement data memory are read out ebsp data.