Micro-electromechanical structure i.e. out-of-plane-acceleration sensor, for use in e.g. vehicle parts, has compensation-stopper producing force and torque on testing mass for compensating force and torque produced by impact-stoppers

摘要

The structure i.e. out-of-plane-acceleration sensor (500), has a lid substrate (310) including impact-stoppers (320) arranged above a movable testing mass (102). Each of compensation-stoppers (520) is arranged corresponding to a position of one the impact-stoppers, and electrically controlled by a compensation voltage. Each compensation-stopper produces an electrostatic force and a rotational torque on the testing mass for compensating another force and a rotational torque produced by the corresponding impact-stoppers. A sensor substrate (104) and the lid substrate are connected by a process. The process is a silicon-metal-bond-process. An independent claim is also included for a method for protecting a micro-electromechanical structure against mechanical impact and electrostatic interferences.