ELECTRON DETECTOR INCLUDING INTIMATELY-COUPLED SCINTILLATOR-PHOTOMULTIPLIER COMBINATION, AND ELECTRON MICROSCOPE AND X-RAY DETECTOR EMPLOYING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a detector for an electron microscope, capable of favorably associating a relationship between a shape and a composition.;SOLUTION: A charged particle beam device (SEM or the like) includes an electron source, an electron column, a sample chamber and a detector (combined EDX-BSED system) 75 for detecting X rays and back scattering electrons from a specimen. An X-ray sensor 78 is disposed on the central axis of an electron trap housing 77, and an electron detector 18'' is disposed on an outside upper surface 76 on an entrance side of the electron trap housing. An electron deflection device (electron trap) 79 is provided at an entrance side end of the electron strap housing, in order to prevent electrons from reaching the X-ray sensor to create background noise. The electron detector includes two SiPMs (silicon photo multiplier detectors). Lines of sight to respective detectors of electrons and X-rays from the specimen are approximately same, so that an image of the specimen having similar parallax and shadows can be obtained.;COPYRIGHT: (C)2016,JPO&INPIT