IMPRINT TRANSFER MATTER, IMPRINT TRANSFER MOLD, AND IMPRINT TRANSFER METHOD

摘要

PROBLEM TO BE SOLVED: To provide a transfer matter with less transfer defect.;SOLUTION: A transfer matter 705 of imprint comprises a base material 702 and an irregular structure formed on the base material 702. The irregular structure includes: a first area 701a of the transfer matter; and a second area 701b of a transfer matter, adjacent to the first area 701a of the transfer matter, and having average residual film thinner than that of the first area 701a of the transfer matter. Heights of plural irregularities in a part proximate to the second area 701b of the transfer matter on the first area 701a of the transfer matter, decrease monotonously as going to the second area 701b of the transfer matter from the first area 701a of the transfer matter. In another embodiment, heights of plural irregularities in a part proximate to the first area 701a of the transfer matter on the second area 701b of the transfer matter decrease monotonously as going to the first area 701a of the transfer matter from the second area 701b of the transfer matter.;COPYRIGHT: (C)2016,JPO&INPIT