OXYGEN-ADDED ScN CRYSTAL THIN FILM, FABRICATION METHOD THEREFOR, ELECTRODE AND ELECTRONIC DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an oxygen-added ScN crystal thin film, which can attain highly reproducibly the electric characteristics of an electronic mobility of 90 (cm²/V sec) or more, an electron density of 1×10²⁰ (cm^-3) or more, which is high in light transmissivity, and which is excellent in surface stability, and provide a manufacturing method thereof, an electrode and an electric device.;SOLUTION: An oxygen-added ScN crystal thin film is characterized in that oxygen is added, and in that the addition of oxygen is 1×10²⁰ (cm^-3) or more and 1×10²¹ (cm^-3) or less.;COPYRIGHT: (C)2015,JPO&INPIT