PROBLEM TO BE SOLVED: To provide an oxygen-added ScN crystal thin film, which can attain highly reproducibly the electric characteristics of an electronic mobility of 90 (cm/V sec) or more, an electron density of 1×10(cm) or more, which is high in light transmissivity, and which is excellent in surface stability, and provide a manufacturing method thereof, an electrode and an electric device.SOLUTION: An oxygen-added ScN crystal thin film is characterized in that oxygen is added, and in that the addition of oxygen is 1×10(cm) or more and 1×10(cm) or less.
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机译：解决的问题：提供一种加氧的ScN晶体薄膜，该薄膜可高度再现地获得90（cm / V sec）或更高的电子迁移率，1×10（cm）或更高的电子密度的电学特性。此外，本发明提供了一种氧添加的ScN晶体薄膜，其特征在于，所述氧的添加率高，并且其表面稳定性优异，并且提供了其制造方法，电极和电子器件。氧的添加量为1×10（cm）以上且1×10（cm）以下。
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