VAPOR DEPOSITION MASK, PRODUCTION METHOD OF VAPOR DEPOSITION MASK, VAPOR DEPOSITION MASK PREFORM, VAPOR DEPOSITION MASK WITH FRAME, AND PRODUCTION METHOD OF ORGANIC SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a vapor deposition mask and a vapor deposition mask with a frame, which satisfies both high definition and weight saving even with a large sized mask, and by which a high definition vapor deposition pattern is formed with strength maintained, and to provide a production method of the vapor deposition mask and a vapor deposition mask preform by which the vapor deposition mask is easily produced, and a production method of an organic semiconductor device by which an organic semiconductor device with high precision is produced.SOLUTION: The vapor deposition mask simultaneously forms vapor deposition patterns for a plurality of screens. Metal masks 10 with a plurality of slits 15 are laminated in one face of a resin mask 20 in the vapor mask 100. An opening 25 required for constituting the plurality of screens is provided in the resin mask, and the opening corresponds to a vapor deposition made pattern. Each slit is provided at a position overlapping with at least a whole one screen, and a metal layer 40 thinner than the metal mask in thickness is provided in either one face or both of an area corresponding to a position overlapping with the slit on one face of the resin mask, and the other face of the resin mask.