Vapor deposition mask, vapor deposition mask preparation body, vapor deposition mask production method, pattern production method, vapor deposition mask with frame, and organic semiconductor element production method

摘要

PROBLEM TO BE SOLVED: To provide a vapor deposition mask and a vapor deposition mask preparation body which satisfy both high-definition and weight saving even if their sizes become large, and can improve yield in a manufacturing process using the vapor deposition mask and improve quality, and a manufacturing method of an organic semiconductor device using the vapor deposition mask.SOLUTION: In a vapor deposition mask 100 in which a metal mask 10 provided with a slit 15 overlapping an opening part 25 is laminated on one surface of a resin mask 20 in which an opening 25 corresponding to a pattern produced by vapor deposition is provided, the above problem is solved by exposing at least a part of a surface on a side where the metal mask 100 contacts the resin mask 20 of the metal mask 10.