首页> 外国专利> SEMICONDUCTOR CIRCUIT, TRANSFER SOURCE SUBSTRATE, TRANSFER DESTINATION SUBSTRATE, SEMICONDUCTOR CIRCUIT DEVICE AND ELECTRO-OPTICAL DEVICE

SEMICONDUCTOR CIRCUIT, TRANSFER SOURCE SUBSTRATE, TRANSFER DESTINATION SUBSTRATE, SEMICONDUCTOR CIRCUIT DEVICE AND ELECTRO-OPTICAL DEVICE

机译:半导体电路,传输源基板,传输目的地基板,半导体电路装置和光电装置

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a semiconductor circuit device capable of being connected to pads provided on a transfer source substrate and conductive wiring provided on a transfer destination substrate, and further to provide the semiconductor circuit device and an electro-optical device.;SOLUTION: A manufacturing method of a semiconductor circuit device comprises: a circuit forming step of forming a semiconductor circuit 120 having a plurality of bumps 125 on a transfer source substrate 100 via a peeling layer 110; a pressing step of causing a transfer destination substrate 300 formed with conductive wiring 310 and the semiconductor circuit 120 to face each other, pressing the transfer destination substrate 300 and the semiconductor circuit 120 via adhesive containing conductive particles and spreading the adhesive; an adhesive curing step of curing the adhesive; and a peeling step of peeling the semiconductor circuit 120 and the transfer source substrate 100 by the peeling layer 110. In the semiconductor circuit 120 formed in the circuit forming step, as viewed in a plan view, the plurality of bumps 125 is formed along a first end side of the semiconductor circuit 120, and at least one of power supply wiring 123 and ground wiring 124 is formed among the plurality of bumps 125 and the first end side.;COPYRIGHT: (C)2015,JPO&INPIT
机译:解决的问题:提供一种半导体电路装置的制造方法,该方法能够连接至设置在转移源基板上的焊盘和设置在转移目的地基板上的导电布线,并且还提供一种半导体电路装置和电光装置。半导体电路器件的制造方法包括:电路形成步骤,其通过剥离层110在转移源基板100上形成具有多个凸块125的半导体电路120;按压步骤,使形成有导电布线310的转移目的地基板300和半导体电路120彼此相对,经由包含导电性粒子的粘合剂按压转移目的地基板300和半导体电路120,并使粘合剂扩散。固化粘合剂的粘合剂固化步骤;以及通过剥离层110剥离半导体电路120和转移源基板100的剥离步骤。在电路形成步骤中形成的半导体电路120中,如俯视图所示,沿着凸部125形成有多个凸块125。半导体电路120的第一端侧,以及在多个凸块125和第一端侧之间形成电源布线123和接地布线124中的至少一个。版权所有:(C)2015,JPO&INPIT

著录项

  • 公开/公告号JP2015156492A

    专利类型

  • 公开/公告日2015-08-27

    原文格式PDF

  • 申请/专利权人 SEIKO EPSON CORP;

    申请/专利号JP20150043277

  • 发明设计人 IRIGUCHI CHIHARU;

    申请日2015-03-05

  • 分类号H01L21/60;G02F1/1345;G02F1/167;G09F9;

  • 国家 JP

  • 入库时间 2022-08-21 15:34:44

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