REVERSE MAGNETRON TYPE COLD CATHODE IONIZATION VACUUM DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a reverse magnetron type cold cathode ionization vacuum device capable of measuring at least a pressure of 10^-9 Pa or lower and in the 10^-10 Pa level.;SOLUTION: A reverse magnetron type cold cathode ionization vacuum device has: a vacuum vessel 102; a cylindrical cathode 2 provided in the vacuum vessel 102; an anode 1 provided on the center axis of the cylinder of the cathode 2, and including a pair of power supply connection parts 1a, 1b for raising temperature; and magnets 6a, 6b provided detachably on the outside of the vacuum vessel 102, for generating a magnetic field in the center axis direction of the cylinder of the cathode 2.;COPYRIGHT: (C)2015,JPO&INPIT