Vacuum measuring device, has cold cathode ionization manometer arranged in measuring tube by inverse magnetron type and heat conducting manometer, and including two cathodes concerning measuring tube opening of tube housing

摘要

The device has a cold cathode ionization manometer arranged in a measuring tube housing (MRG) by an inverse magnetron type and a heat conducting manometer. The manometer has two cathodes (K1, K2) arranged in series concerning a measuring tube opening (MOE) of the tube housing. Discharged gas is separated and annealed between cathodes and an anode (A) of the cold cathode ionization manometer. A discharge path between the cathode (K1) and the anode is formed as a gas cleaning device. The heat conducting manometer is arranged in a chamber behind the cathode (K2) concerning the opening.