TRANSLUCENT SILVER ALLOY FILM, AND SPUTTERING TARGET TRANSLUCENT SILVER ALLOY FILM FORMATION

摘要

PROBLEM TO BE SOLVED: To provide: a translucent Ag alloy film which has superior smoothness, heat resistance, and resistance against sulfurizing, and good conductivity and permeability; and a sputtering target for translucent Ag alloy film formation which is adequate for growing such a translucent Ag alloy film.SOLUTION: A translucent Ag alloy film includes any one of In and Sn or both of them by 0.1-1.5 at% in total, and Sb by over 0.010 to 2.0 at% with the balance consisting of Ag and inevitable impurities. The translucent Ag alloy film has a thickness of 20 nm or less, and a transmittance of 30% more at a wavelength of 550 nm.