IMPRINT MOLD BASE PLATE, IMPRINT MOLD AND MANUFACTURING METHOD OF THESE, AND IMPRINT MOLD REGENERATION PROCESS

摘要

PROBLEM TO BE SOLVED: To provide an imprint mold base plate and an imprint mold, having a concavity of desired precision and being partially reusable, and also to provide a manufacturing method of these imprint mold base plate and imprint mold, and a method for regenerating the imprint mold.;SOLUTION: An imprint mold base plate 1 includes: a thin plate part 2 having a principal plane 2A on which a fine uneven pattern is formable; a support part 3 of a hollow cylindrical shape, supporting a counter surface 2B countering the principal plane 2A of the thin plate part 2; and a joint part 4 interposed between and connecting the thin plate part 2 and the support part 3. The thin plate part 2 is connected to the support part 3 via the joint part 4 such that one opening end 31 of the support part 3 of a hollow cylindrical shape is closed by the counter surface 2B. The joint part 4 is configured such that the thin plate part 2 and the support part 3 are separable.;COPYRIGHT: (C)2015,JPO&INPIT