PATTERN QUALITY MANAGEMENT CHART, PATTERN QUALITY MANAGEMENT METHOD AND PATTERN FORMATION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a pattern quality management chart by which proper/improper condition for a pattern formation is easily determined.;SOLUTION: In a pattern quality management chart, a plurality of unit region groups G11-Gij are formed on the surface of a chart base material S. Each unit region group comprises three unit regions respectively including first regions which has specific affinity with functional liquid to form a pattern and being surrounded by a second region which has lower affinity than the specific affinity. Each unit region has such a shape and size that the unit region is filled with the functional liquid without overflowing when the functional liquid in a specified range of supply amount is supplied in a specified condition, a part of the unit region is not filled with the functional liquid when the functional liquid less than the specified range of supply amount is supplied in the specified condition, and a part of the functional liquid is flowed over the peripheral part when the functional liquid more than the specified range of supply amount is supplied in the specified condition.;COPYRIGHT: (C)2015,JPO&INPIT