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PATTERN QUALITY MANAGEMENT CHART, PATTERN QUALITY MANAGEMENT METHOD, AND PATTERN FORMATION METHOD

机译:图案质量管理图表,图案质量管理方法和图案形成方法

摘要

A pattern quality management chart is provided with: a chart-use substrate comprising the same material as a substrate that is patterned by first areas having a predetermined affinity for a functional liquid for patterning, and second areas having an affinity lower than the predetermined affinity; and at least one unit-area group formed upon the surface of the chart-use substrate. The unit-area group includes at least one unit area comprising a first area surrounded therearound by a second area, wherein the unit area has a shape and a size such that: when functional liquid within a predetermined supply amount range is supplied under predetermined supply conditions into the unit area, the functional liquid does not overflow into the surrounding second area, and the entirety of the unit area is filled with the functional liquid; when functional liquid of a supply amount less than the predetermined supply amount range is supplied under the predetermined supply conditions into the unit area, a part of the unit area is not filled with the functional liquid; and when functional liquid of a supply amount greater than the predetermined supply amount range is supplied under the predetermined supply conditions, into the unit area, a portion of the functional liquid overflows into the surrounding second area.
机译:图案质量管理图包括:图表用基板,其包括与由与用于图案化的功能液具有预定亲和力的第一区域,和具有比所述预定亲和力低于预定亲和力的第二区域图案化的衬底相同的材料制成的图表用基板;在制图用基板的表面上形成至少一个单位面积基团。单位区域组包括至少一个单位区域,该单位区域包括由第二区域围绕的第一区域,该单位区域具有如下形状和大小,使得:在预定供应条件下供应预定供应量范围内的功能液时进入单位区域时,功能液体不会溢出到周围的第二区域中,并且整个单位区域被功能液体填充。当在预定的供应条件下将供应量小于预定供应量范围的功能液供应到单位区域时,该单位区域的一部分没有被功能液填充。当在预定供应条件下将供应量大于预定供应量范围的功能液供应到单位区域时,一部分功能液溢出到周围的第二区域中。

著录项

  • 公开/公告号WO2015045511A1

    专利类型

  • 公开/公告日2015-04-02

    原文格式PDF

  • 申请/专利权人 FUJIFILM CORPORATION;

    申请/专利号WO2014JP65930

  • 发明设计人 TATSUTA TAKEICHI;

    申请日2014-06-16

  • 分类号H01L21/288;B05C11/10;H01L21/28;H05K3;

  • 国家 WO

  • 入库时间 2022-08-21 15:07:30

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