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PATTERN QUALITY MANAGEMENT CHART, PATTERN QUALITY MANAGEMENT METHOD, AND PATTERN FORMATION METHOD

机译:图案质量管理图表,图案质量管理方法和图案形成方法

摘要

A pattern quality management chart is provided with: a chart-use substrate comprising the same material as a substrate that is patterned by first areas having a predetermined affinity for functional liquid for patterning, and a second area having an affinity lower than the predetermined affinity; and at least one unit-area group formed upon the surface of the chart-use substrate. The unit-area group includes a plurality of unit areas which each comprise a first area surrounded therearound by a second area, wherein each unit area is classified into the following when functional liquid of a predetermined amount is supplied under predetermined supply conditions into the unit area: a compliant type unit area, which has a shape and a size such that the functional liquid does not overflow into the surrounding second area and such that the entirety of the unit area is filled with the functional liquid; and a non-compliant type unit area, which has a shape and a size such that a portion of the functional liquid overflows into the surrounding second area and/or part of the unit area is not filled with the functional liquid. The plurality of unit areas include at least one compliant type unit area and at least one non-compliant type unit area.
机译:图案质量管理图包括:图表用基板,其包括与由与用于图案化的功能液具有预定亲和力的第一区域形成图案的基板相同的材料,和具有比所述预定亲和力低的亲和力的第二区域进行图案化的基板。在制图用基板的表面上形成至少一个单位面积基团。单位区域组包括多个单位区域,每个单位区域包括被第二区域围绕的第一区域,其中当在预定的供应条件下将预定量的功能液供应到单位区域中时,将每个单位区域划分为以下类别: :顺应型单元区域,其形状和大小使得功能液不会溢出到周围的第二区域中,并且整个单元区域都充满功能液;非顺应性型单位区域,其形状和大小使得一部分功能液溢出到周围的第二区域和/或部分单位区域中没有被功能液填充。多个单位区域包括至少一个合规型单位区域和至少一个非合规型单位区域。

著录项

  • 公开/公告号WO2015045510A1

    专利类型

  • 公开/公告日2015-04-02

    原文格式PDF

  • 申请/专利权人 FUJIFILM CORPORATION;

    申请/专利号WO2014JP65917

  • 发明设计人 TATSUTA TAKEICHI;

    申请日2014-06-16

  • 分类号H01L21/288;H01L21/28;H05K3;H05K3/10;

  • 国家 WO

  • 入库时间 2022-08-21 15:07:30

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