ELECTROMECHANICAL ELEMENT, METHOD OF PRODUCING ELECTROMECHANICAL ELEMENT, ELECTROMECHANICAL DEVICE, CABINET, GRIPPING DEVICE, OPTICAL DEFLECTION DEVICE, IMAGE FORMATION DEVICE, AND IMAGE PROJECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a shape of an electromechanical element which makes it possible to reliably grip and separate an electromechanical element from a wafer.;SOLUTION: An electromechanical element 30 comprises a rectangular support frame 11, a movable part 12, and a support beam 13 that supports the movable part 12 with respect to the support frame 11 so as to enable a rotation oscillation, wherein a notch part 14 is provided at at least one of four corners of the support frame 11.;COPYRIGHT: (C)2015,JPO&INPIT