MICROFABRICATION SYSTEM, MICROFABRICATION DEVICE, AND MICROFABRICATION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a microfabrication system capable of further accurately performing pattern formation.;SOLUTION: A microfabrication system comprises a microfabrication device and a control device. The microfabrication device includes: a stage unit capable of supporting a substrate; a chuck unit which is opposite to the stage unit and can make a template access or press a resist layer while supporting a template; a storage unit which can store relation between pressing force of the template made to be access or press the resist layer and a film thickness of the resist layer accessed or pressed by the template; and a control unit for controlling the access or press of the template to the resist layer. The control device corrects the relation so as to make film thickness distribution of the resist layer accessed or pressed by the template become within target distribution, when the film thickness distribution is out of the target distribution.;COPYRIGHT: (C)2015,JPO&INPIT