MICROFABRICATION METHOD, MICROFABRICATION APPARATUS AND RECORDING MEDIUM HAVING MICROFABRICATION PROGRAM RECORDED THEREIN

摘要

According to one embodiment of the the present invention, there is provided a fine machining method using the resist. Each first region of the resist pattern forming surface determines the amount of need. Forming a resist pattern to determine the total amount of the entire face. Dividing the total amount of the resist as the resist drop of the capacitor, determining the total number of resist drop and determines the provisional position of the pattern-forming surface with respect to the total number of each of the resist drop. Assigning each of a first region closest to each drop, and the resist, the resist drop every nine minutes by changing the pattern forming face each allocated second area, the capacitance of one drop per second resist region, which fall within the second region 1 for each zone is determined by a value obtained by dividing the total amount of the resist that requires determined. When the distribution of the pattern formed in the surface of the value obtained by dividing the range within which the target, and confirms the position of all the resist drop. ;