Transparent electrode for thin film solar cell, substrate with transparent electrode for thin film solar cell and thin film solar cell using the same, and method for producing transparent electrode for thin film solar cell

摘要

Disclosed are: a transparent electrode having a zinc oxide film wherein initial characteristics and humidity resistance during long-time use coexist; and a thin film solar cell provided with said electrode. The transparent electrode contains a transparent conductive layer mainly made of zinc oxide. The transparent conductive film preferably has the following characteristics: having surface irregularities; a carrier concentration of 9 × 10 19 cm -3 or less; a crystal structure having a (110) preferred orientation; a ratio of a (110) peak intensity to a (002) peak intensity I(110)/I(002) measured by X-ray diffraction being 50 or more; and a crystallite with a (110) orientation has a size of 23 nm or more and 50 nm or less, in a planar direction parallel to a substrate; and 30 nm or more and 60 nm or less, in a planar direction perpendicular to the substrate.