PREDICTION EXPRESSION GENERATION METHOD, PREDICTION EXPRESSION GENERATION DEVICE AND PREDICTION EXPRESSION GENERATION PROGRAM

摘要

PROBLEM TO BE SOLVED: To generate a prediction expression presenting simple dependency of a manufacturing condition parameter and a manufacturing result.;SOLUTION: A prediction expression generation device applies a data order in a predetermined order according to the size of an index, to a plurality of pieces of past result data acquired in a past and comprising a manufacturing condition and a predetermined index related to a manufacturing result using the manufacturing condition; and is a predetermined prediction expression calculating a score by applying the data of the manufacturing condition. When a score order is applied in a predetermined order according to the size of the score calculated by the prediction expression, to each of the plurality of pieces of past result data, the prediction expression generation device generates a prediction expression so that the score order of each of the plurality of pieces of past result data is identical to the data order.;COPYRIGHT: (C)2015,JPO&INPIT