N-heterocyclic carbenes, metal complexes having an N-heterocyclic carbene ligand, a method of polymerizing silane and cyclosilane using a lanthanoid compound, an ink composition formed thereby, and a semiconductor film How to form

摘要

Compositions and methods for controlled polymerization and / or oligomerization of silane (and optionally cyclosilane) compounds, including those of the general formulas SinH2n and SinH2n + 2, and halosilanes and arylsilanes, with low levels of carbon and metal contamination Producing soluble polysilanes, polygermanes and / or polysilagermanes having high molecular weight, low volatility, high purity, high solubility, and / or high viscosity. Polysilane, polygermane, and / or polysilagermane are useful precursors for conductive films, semiconductor films, and dielectric films containing silicon and / or germanium. [Selection] Figure 3