Captured image acquisition method of the liquid crystal array inspection device and a liquid crystal array inspection equipment

摘要

And eliminate the accumulated error of the imaging range which is generated on the basis of the movement resolution of the moving stage, to improve the positional accuracy of the defect detection in the liquid crystal array inspection. It drives the array to the liquid crystal substrate by applying a test signal of a predetermined voltage, and images the liquid crystal substrate on the basis of a signal of the secondary electrons or the like which is obtained by irradiating a charged particle of the electron beam or the like on the liquid crystal substrate, the imaging In the liquid crystal array inspection apparatus for inspecting an array of liquid crystal substrate on the basis of the captured image obtained by, detects the movement variation of the moving part for moving the liquid crystal substrate, and the moving speed of the mobile unit on the basis of the movement variations, each imaging In addition to correcting the movement distance when performing the error component that occurs is corrected for accumulated errors caused by accumulated based on the movement resolution associated with the correction of the movement intervals. Correction of the cumulative error in the imaging of a plurality of times, is carried out by correcting the movement distance by the movement resolution of the moving part for each predetermined number of times of imaging.