LIQUID CRYSTAL ARRAY INSPECTION DEVICE, AND METHOD FOR ACQUIRING IMAGES CAPTURED BY LIQUID CRYSTAL ARRAY INSPECTION DEVICE

摘要

In order to eliminate cumulative errors in an imaging range generated on the basis of the movement resolution of a moving stage, and improve the positional accuracy of defect detection in liquid crystal array inspections, this liquid crystal array inspection device applies a test signal of a prescribed voltage to a liquid crystal substrate to drive an array, captures images of the liquid crystal substrate on the basis of a signal, such as a secondary electron beam obtained by irradiating the liquid crystal substrate with charged particles, such as an electron beam, and inspects the liquid crystal substrate array on the basis of the captured images obtained by the abovementioned imaging operations. The liquid crystal array inspection device: detects movement variations in a moving part that moves the liquid crystal substrate, and corrects the movement speed of the moving part on the basis of the movement variations, and movement intervals when performing each imaging operation; and corrects a cumulative error produced by the accumulation of errors generated on the basis of movement resolutions associated with the correction of the movement intervals. In an imaging operation performed a plurality of times, the correction of a cumulative error involves carrying out only a movement resolution of the moving part for each prescribed number of imaging operations by correcting the movement interval.