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Structure, localized surface plasmon resonance sensor chip, and localized surface plasmon resonance sensor, as well as methods for their preparation

机译:结构,局部表面等离子体共振传感器芯片,局部表面等离子体共振传感器及其制备方法

摘要

It may provide a localized surface plasmon resonance sensor more sensitive, to realize the localized surface plasmon resonance sensor chip. And a cylindrical body and flat portion, the tubular body is provided upright opening to face to the plane of the flat portion, the structure according to the present invention, the opening of the cylindrical body The average inner diameter is in the range of 5nm or less 2,000nm, and the ratio of the inner diameter A of the opening of the cylindrical body, and the inner diameter B at the midpoint of the depth from the opening of the cylindrical body (A / B) is in the range of 1.00 to 1.80, and is characterized in that the bottom of the cylindrical body is non-spherical.
机译:它可以提供更灵敏的局部表面等离子体共振传感器,以实现局部表面等离子体共振传感器芯片。并且,在筒状体和平坦部上,在筒状体上设置有与该平坦部的平面相对的直立的开口,在本发明的结构中,筒状体的开口的平均内径在5nm以下的范围内。小于2,000nm,并且圆柱体的开口的内径A与从圆柱体的开口的深度的中点处的内径B的比(A / B)在1.00至1.0的范围内。 1.80,其特征在于圆柱体的底部是非球形的。

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