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STRUCTURE, CHIP FOR LOCALIZED SURFACE PLASMON RESONANCE SENSOR, LOCALIZED SURFACE PLASMON RESONANCE SENSOR, AND MANUFACTURING METHODS THEREFOR
STRUCTURE, CHIP FOR LOCALIZED SURFACE PLASMON RESONANCE SENSOR, LOCALIZED SURFACE PLASMON RESONANCE SENSOR, AND MANUFACTURING METHODS THEREFOR
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机译:局部表面等离激元传感器的结构,芯片,局部表面等离激元传感器的制造方法
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摘要
Implemented is a chip for localized surface plasmon resonance sensor, which is able to provide a localized surface plasmon resonance sensor of higher sensitivity. A structure of the invention is characterized by including a planar section and tubular bodies, wherein the tubular bodies are vertically arranged so that openings thereof open at the planar surface of the planar section, an average inner diameter of the openings of the tubular bodies is within a range of from 5 nm to 2,000 nm, a ratio (A/B) of inner diameter A of the openings of the tubular bodies and inner diameter B at the midpoint of the depth from the openings of the tubular bodies is within a range of from 1.00 to 1.80, and the bottom of the tubular bodies is aspherical.
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