cobalt-based film forming method, a cobalt-based film-forming material, and novel compounds

摘要

Low melting point, and is liquid at 40 ℃ before and after small cause solidification occlusion in the middle pipe, it can make stable supply of raw materials, formation of high-quality cobalt film A that provide easy techniques bis (N, N'- diisopropylcarbodiimide propionic amidinate) cobalt is used.