Method for producing micro-mirror with optical waveguide , an intermediate structure , and optical waveguides with a micro -mirror may be used in its production process

摘要

PROBLEM TO BE SOLVED: To reduce manufacturing processes of an optical waveguide with a micromirror.;SOLUTION: This method for manufacturing an optical waveguide 1 including a micromirror 18 that is formed with a metal reflection film 15b on a slope face 18a of a core 17 includes: a resin layer forming step for forming an uncured core-forming resin layer 14; a metal film disposing step for disposing a metal layer 15 on the outer surface of the core-forming resin layer 14; and a mold pushing step for pushing a mold 16 that includes a projection 16a having a mirror-forming slope face 16b, in such a manner as entering into the core-forming resin layer 14, while allowing the projection 16a to push the metal film 15 into the core-forming resin layer 14.;COPYRIGHT: (C)2012,JPO&INPIT