Metal impregnated carbon -based substrate , method of manufacturing the heat dissipation material and metal impregnated carbon -based substrate containing the same

摘要

PROBLEM TO BE SOLVED: To solve the problem in which: heat dissipation materials made from inorganic-based materials such as a ceramic substrate and a diamond substrate have high hardness and low workability; and those made from carbon-based materials such as a graphite film and carbon nano-tubes have low heat dissipation.SOLUTION: A manufacturing method of a heat dissipation material includes: removing aluminum deposited on the surface of an aluminum-impregnated graphite substrate by means of a wet etching method with hydrochloric acid (step 101); and then, forming an irregular structure in the order of nanometers on the surface of the aluminum impregnation graphite substrate (step 102).