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Transistors having features which preclude straight-line lateral conductive paths from a channel region to a source/drain region

机译:晶体管具有排除从沟道区域到源极/漏极区域的直线横向导电路径的特征

摘要

Some embodiments include transistors having a channel region under a gate, having a source/drain region laterally spaced from the channel region by an active region, and having one or more dielectric features extending through the active region in a configuration which precludes any straight-line lateral conductive path from the channel region to the source/drain region. The dielectric features may be spaced-apart islands in some configurations. The dielectric features may be multi-branched interlocking structures in some configurations.
机译:一些实施例包括这样的晶体管,该晶体管具有在栅极下方的沟道区,具有通过有源区与沟道区横向间隔开的源极/漏极区,以及具有以排除任何直线的配置延伸通过有源区的一个或多个介电特征。从沟道区到源/漏区的横向导电路径。在某些配置中,电介质特征可以是间隔开的岛。在某些配置中,电介质特征可以是多分支互锁结构。

著录项

  • 公开/公告号US08884368B1

    专利类型

  • 公开/公告日2014-11-11

    原文格式PDF

  • 申请/专利权人 MICRON TECHNOLOGY INC.;

    申请/专利号US13897112

  • 发明设计人 MICHAEL A. SMITH;

    申请日2013-05-17

  • 分类号H01L29/66;H01L29/78;H01L29/10;

  • 国家 US

  • 入库时间 2022-08-21 15:26:00

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