首页> 外国专利> MEMS SCANNER HAVING COIL AND MANUFACTURING METHOD OF COIL FOR MEMS SCANNER

MEMS SCANNER HAVING COIL AND MANUFACTURING METHOD OF COIL FOR MEMS SCANNER

机译:具有线圈的MEMS扫描仪及用于MEMS扫描仪的线圈的制造方法

摘要

The present disclosure may provide a MEMS scanner including a mirror configured to reflect light, a gimbal connected to the mirror to rotatably support the mirror, and a winding portion provided at the mirror or the gimbal to generate an electromagnetic force in interaction with a magnetic field formed in the vicinity when a current flows therethrough so as to adjust a rotational angle of the mirror, wherein the winding portion includes a silicon layer, a coil layer deposited on the silicon layer to generate physical deformation due to a current flowing therethrough, and a plurality of hollow holes formed on the coil layer to provide elasticity so as to reduce an amount of impact due to the physical deformation, and increase the dissipation area of heat generated.
机译:本公开可以提供一种MEMS扫描仪,该MEMS扫描仪包括被配置为反射光的反射镜,连接至该反射镜以可旋转地支撑该反射镜的万向接头,以及设置在该反射镜或该万向接头上以产生与磁场相互作用的电磁力的绕组部分。所述绕组部分包括硅层,沉积在所述硅层上以由于电流流过而产生物理变形的线圈层,以及在所述电流形成时形成在附近的电流以调节反射镜的旋转角度。多个空心孔形成在线圈层上以提供弹性,从而减少由于物理变形而产生的冲击量,并增加产生的热量的散热面积。

著录项

  • 公开/公告号US2015277105A1

    专利类型

  • 公开/公告日2015-10-01

    原文格式PDF

  • 申请/专利权人 LG ELECTRONICS INC.;

    申请/专利号US201514674799

  • 发明设计人 JOODO PARK;CHIHWAN JEONG;

    申请日2015-03-31

  • 分类号G02B26/08;G02B26/10;

  • 国家 US

  • 入库时间 2022-08-21 15:25:02

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