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MEMS MEMS MEMS SCANNER HAVING COIL AND MANUFACTURING METHOD OF COIL FOR MEMS SCANNER

机译:具有线圈的微机电系统微机电扫描仪及其制造方法

摘要

The present invention, a mirror that reflects light, a gimbal (gimbal) connected to the mirror and rotatably supporting the mirror, and installed in the mirror or the gimbal, and when a current flows, interacts with a magnetic field formed around the electromagnetic force It includes a winding portion for adjusting the rotation angle of the mirror to generate, the winding portion, a silicon layer (silicon layer), the silicon layer, the coil layer (coil layer) that is physically deformed by the flowing current, And a plurality of hollow holes formed on the coil layer to provide elasticity to reduce the amount of impact due to the physical deformation and to expand the heat dissipation area.
机译:本发明是一种反射光的镜子,连接到镜子并可旋转地支撑镜子并安装在镜子或万向架中的万向架(万向架),并且当电流流动时,该万向架与围绕电磁力形成的磁场相互作用。它包括用于调节反射镜的旋转角度以产生的绕组部分,绕组部分,硅层(硅层),硅层,通过流动电流而物理变形的线圈层(线圈层),以及多个空心孔形成在线圈层上,以提供弹性以减少由于物理变形而产生的冲击量并扩大散热面积。

著录项

  • 公开/公告号KR102089954B1

    专利类型

  • 公开/公告日2020-03-17

    原文格式PDF

  • 申请/专利权人 엘지전자 주식회사;

    申请/专利号KR20140038793

  • 发明设计人 박주도;정치환;

    申请日2014-04-01

  • 分类号B81B7/02;H01L21/027;

  • 国家 KR

  • 入库时间 2022-08-21 11:05:06

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