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METHOD OF FABRICATING A SPUTTERING TARGET, SPUTTERING TARGET FABRICATED BY USING THE METHOD, AND AN ORGANIC LIGHT-EMITTING DISPLAY APPARATUS FABRICATED USING THE SPUTTERING TARGET
METHOD OF FABRICATING A SPUTTERING TARGET, SPUTTERING TARGET FABRICATED BY USING THE METHOD, AND AN ORGANIC LIGHT-EMITTING DISPLAY APPARATUS FABRICATED USING THE SPUTTERING TARGET
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机译:溅射目标的制造方法,使用该方法制造的散射目标以及使用该溅射目标制造的有机发光显示装置
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摘要
A method of fabricating a sputtering target, a sputtering target fabricated by the method, and an organic light-emitting display apparatus fabricated by using the sputtering target. The sputtering target may be used for forming a thin film encapsulation layer. The sputtering target includes tin oxide as a main component, and a copper fluoride compound as a dopant.
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