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METHOD FOR FABRICATING SPUTTERING TARGET, SPUTTERING TARGET FABRICATED THEREBY, AND METHOD FOR FABRICATING ORGANIC LIGHT EMITTING DISPLAY APPARATUS USING SPUTTERING TARGET
METHOD FOR FABRICATING SPUTTERING TARGET, SPUTTERING TARGET FABRICATED THEREBY, AND METHOD FOR FABRICATING ORGANIC LIGHT EMITTING DISPLAY APPARATUS USING SPUTTERING TARGET
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机译:制造散射目标的方法,由此制造的散射目标以及利用散射目标制造有机发光显示装置的方法
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摘要
The present invention relates to a method for fabricating a sputtering target which can conduct film formation on an insulating inorganic material in a sputtering method; a sputtering target fabricated thereby; and a method for fabricating an organic light emitting display apparatus using the sputtering target. According to an embodiment of the present invention, the method for fabricating a sputtering target comprises the steps of: preparing a first powdered material including at least tin oxide; fabricating a mixture by mixing the first powdered material and a second powdered material containing carbon; and fabricating a sputtering target by compressing and sintering the mixture while the mixture is in a reducing process.;COPYRIGHT KIPO 2015
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