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THICKENED STRESS RELIEF AND POWER DISTRIBUTION LAYER

机译:厚应力消除和配电层

摘要

An embodiment includes a semiconductor structure comprising: a frontend portion including a device layer; a backend portion including a bottom metal layer, a top metal layer, and intermediate metal layers between the bottom and top metal layers; wherein (a) the top metal layer includes a first thickness that is orthogonal to the horizontal plane in which the top metal layer lies, the bottom metal layer includes a second thickness; and the intermediate metal layers includes a third thickness; and (b) the first thickness is greater than or equal to a sum of the second and third thicknesses. Other embodiments are described herein.
机译:一个实施例包括一种半导体结构,该半导体结构包括:前端部分,该前端部分包括器件层;以及后端部分包括底部金属层,顶部金属层以及在底部金属层和顶部金属层之间的中间金属层;其中,(a)顶部金属层包括垂直于顶部金属层所在的水平面的第一厚度,底部金属层包括第二厚度;中间金属层包括第三厚度; (b)第一厚度大于或等于第二和第三厚度之和。本文描述了其他实施例。

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