PROCESSES AND SYSTEMS FOR ENGINEERING A BARRIER SURFACE FOR COPPER DEPOSITION

摘要

A method for processing an interconnect structure on a substrate is provided, including: depositing a metallic barrier layer to line the interconnect structure, the metallic barrier layer configured to prevent diffusion of copper into the dielectric layer; depositing a thin copper seed layer over the metallic barrier layer in the interconnect structure; depositing a gap-fill copper layer over the thin copper seed layer; removing copper overburden and metallic barrier overburden, wherein removing copper overburden and metallic barrier overburden creates a planarized copper surface on the gap-fill copper layer; selectively depositing a thin layer of a cobalt-containing material on the reduced planarized copper surface; wherein the substrate is processed and transferred in controlled environments to minimize exposure to oxygen, the controlled environments defined by one or more controlled ambient environments and/or one or more vacuum environments.