首页> 外国专利> VAPOR DEPOSITION DEVICE, VAPOR DEPOSITION METHOD, AND METHOD OF MANUFACTURING ORGANIC ELECTROLUMINESCENT DISPLAY DEVICE

VAPOR DEPOSITION DEVICE, VAPOR DEPOSITION METHOD, AND METHOD OF MANUFACTURING ORGANIC ELECTROLUMINESCENT DISPLAY DEVICE

机译：气相沉积装置，气相沉积方法以及制造有机电致发光显示装置的方法

页面导航

摘要
著录项
相似文献

摘要

A vapor deposition device (50) in accordance with the present invention is a vapor deposition device for forming a film on a film formation substrate (60), the vapor deposition device including a vapor deposition source (80) that has an injection hole (81) from which vapor deposition particles are injected, a vapor deposition particle crucible (82) for supplying the vapor deposition particles to the vapor deposition source (80), and a rotation motor (86) for changing a distribution of the injection amount of the vapor deposition particles by rotating the vapor deposition source (80).

机译：根据本发明的气相沉积装置（ 50 ）是一种用于在膜形成基板（ 60 ）上形成膜的气相沉积装置，该气相沉积装置包括：汽相沉积源（ 80 ）具有喷射孔（ 81 ），汽相沉积颗粒坩埚（ 82 >），用于将气相沉积颗粒供应至气相沉积源（ 80 ），以及用于改变气相沉积的喷射量分布的旋转电机（ 86 ）通过旋转气相沉积源（ 80 ）沉积颗粒。 展开▼

著录项

公开/公告号US2014345527A1

专利类型

公开/公告日2014-11-27

原文格式PDF

申请/专利权人 SHARP KABUSHIKI KAISHA;
展开▼

申请/专利号US201414452470

发明设计人 SHINICHI KAWATO;TOHRU SONODA;SATOSHI HASHIMOTO;SATOSHI INOUE;
展开▼

申请日2014-08-05

分类号C23C16/455;

国家 US

入库时间 2022-08-21 15:23:19

相似文献

专利

外文文献

中文文献

1. 包含有机铂化合物的化学气相沉积用原料及使用该化学气相沉积用原料的化学气相沉积法 [P] . 中国专利： CN103874705B . 2016.08.17

2. 包含有机铂化合物的化学气相沉积用原料及使用该化学气相沉积用原料的化学气相沉积法 [P] . 中国专利： CN103874705A . 2014-06-18

3. EVALUATION METHOD OF VAPOR DEPOSITION CHAMBER OF ORGANIC DEVICE MANUFACTURING APPARATUS STANDARD MASK APPARATUS AND STANDARD SUBSTRATE USED THEREIN STANDARD MASK APPARATUS MANUFACTURING METHOD ORGANIC DEVICE MANUFACTURING APPARATUS HAVING VAPOR DEPOSITION CHAMBER EVALUATED BY EVALUATION METHOD ORGANIC DEVICE HAVING VAPOR DEPOSITION LAYER FORMED IN VAPOR DEPOSITION CHAMBER EVALUATED BY EVALUATION METHOD AND VAPOR DEPOSITION CHAMBER MAINTENANCE METHOD OF ORGANIC DEVICE MANUFACTURING APPARATUS [P] . KR20210116310A . 2021-09-27

机译：有机器件制造装置的气相沉积室的评估方法标准掩模装置和标准衬底的标准掩模装置制造方法有机器件制造装置具有通过评估方法评价的气相沉积室，通过评估方法，该有机装置具有通过评估评估的气相沉积室中形成的气相沉积层。有机器件制造装置的方法和气相沉积室维持方法

4. VAPOR DEPOSITION MASK, VAPOR DEPOSITION MASK WITH FRAME, VAPOR DEPOSITION MASK PREPARATORY BODY, MANUFACTURING METHOD FOR VAPOR DEPOSITION MASK, MANUFACTURING METHOD FOR ORGANIC SEMICONDUCTOR ELEMENT, MANUFACTURING METHOD FOR ORGANIC EL DISPLAY, AND PATTERN FORMATION METHOD [P] . 世界知识产权组织专利： WO2019202902A1 . 2019-10-24

机译：气相沉积面膜，具有框架的气相沉积面膜，气相沉积面膜制备体，气相沉积面膜的制备方法，有机半导体元件的制备方法，有机EL显示器的制备方法和图案形成方法

5. VAPOR DEPOSITION MASK, VAPOR DEPOSITION MASK HAVING FRAME, VAPOR DEPOSITION MASK PREPARATION BODY, METHOD FOR FORMING PATTERN, METHOD FOR MANUFACTURING VAPOR DEPOSITION MASK, METHOD FOR MANUFACTURING ORGANIC SEMICONDUCTOR ELEMENT AND METHOD FOR MANUFACTURING ORGANIC ELECTROLUMINESCENCE DISPLAY [P] . 日本专利： JP2019108584A . 2019-07-04

机译：气相沉积面膜，具有框架的气相沉积面膜，气相沉积面膜制备体，图案形成方法，气相沉积面膜的制造方法，有机半导体元件的制造方法以及有机电子发光的制造方法

1. Discrete formulation of mixed finite element methods for vapor deposition chemical reaction equations [J] . LUO Zhen-dong, ZHOU Yan-jie, ZHU Jiang 应用数学和力学（英文版） . 2007,第005期

2. COMPARISON OF THREE METHODS TO PREDICT ADSORPTION ISOTHERMS FOR ORGANIC VAPORS FROM SIMILAR AND NON-SIMILAR POLARITY REFERENCE VAPORS [J] . 汪大翚, T.Shen, Kenneth E.Noll 中国化学工程学报：英文版 . 1989,第002期

3. Optical Emission Spectroscopy of Electron Cyclotron Resonance-Plasma Enchanced Metalorganic Chemical Vapor Deposition Process for Deposition of GaN Film [J] . 符斯列, 陈俊芳, 李赟, 等离子体科学和技术：英文版 . 2008,第001期

4. Evidence for alkali metal formation at a cathode interface of organic electroluminescent devices by thermal decomposition of alkali metal carboxylates during their vapor deposition [J] . Chimed Ganzorig, Masamichi Fujihira Applied Physics Letters . 2004,第20期

5. Patent Issued for Organic Thin Film Deposition Device, Organic EL Element Manufacturing Device, and Organic Thin Film Deposition Method [J] . Robotics and Machine Learning . 2012,第46期

6. "Organic Thin Film Deposition Device, Organic El Element Manufacturing Device, and Organic Thin Film Deposition Method" in Patent Application Approval Process [J] . Robotics and Machine Learning . 2012,第40期

7. Organic Vapor Phase Deposition (OVPD) for efficient OLED manufacturing: the specific advantages and possibilities of carrier-gas enhanced vapor phase deposition for the manufacturing of organic thin film devices [C] . Juergen Kreis, Markus Schwambera, Dietmar Keiper, Organic light emitting materials and devices XVI. . 2012

8. Low-pressure metalorganic chemical vapor deposition of zinc sulfide phosphor layers with modulation doping for thin film electroluminescent devices. [D] . Yu, Jengyi Eddy. 1994

9. Method for Aluminum Oxide Thin Films Prepared through Low Temperature Atomic Layer Deposition for Encapsulating Organic Electroluminescent Devices [O] . Hui-Ying Li, Yun-Fei Liu, Yu Duan, 2015

10. Single-layer organic electroluminescent devices by vapor deposition polymerization [O] . Weng-Kou Wen 2011

11. Atmospheric Pressure Chemical Vapor Deposition and Jet Vapor Deposition of CdTe for High Efficiency Thin Film PV Devices [R] . Woods, L., Meyers, P. 2002

1. Enhanced Efficiency and Durability of Organic Electroluminescent Devices by Doping in Emitting LayerEnhanced Efficiency and Durability of Organic Electroluminescent Devices by Doping in Emitting Layer [J] . HUANGJing－song ,LIChuan－nan ,等 . 半导体光子学与技术：英文版 . 1999,第3期

2. GROWTH MECHANISM OF TiC WHISKERS PREMRED BY A MODIFIED CHEMICAL VAPOR DEPOSITION METHOD [J] . J.S. Pan and Y. W. Yuan (Department of Materials Science and Engineering Tsinghua Universityt Beijing 100084 China)(Department of Materials Science and Engineering Tsinghua Universityt Beijing 100084 China) . 金属学报：英文版 . 1999,第3期

3. 土壤及沉积物中有机氯农药和多氯联苯的气相色谱-质谱分析方法研究 [C] . 佟玲 ,杨佳佳 ,吴淑琪 . 2009年中国有机质谱年会 . 2009

4. 在半导体制造中使用物理气相沉积代替化学气相沉积来生长氮化钛阻挡层 [A] . 张立莉 . 2008