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LASER CONTACT PROCESSES, LASER SYSTEM, AND SOLAR CELL STRUCTURES FOR FABRICATING SOLAR CELLS WITH SILICON NANOPARTICLES
LASER CONTACT PROCESSES, LASER SYSTEM, AND SOLAR CELL STRUCTURES FOR FABRICATING SOLAR CELLS WITH SILICON NANOPARTICLES
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机译:用硅纳米粒子制造太阳能电池的激光接触过程,激光系统和太阳能电池结构
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摘要
A laser contact process is employed to form contact holes to emitters of a solar cell. Doped silicon nanoparticles are formed over a substrate of the solar cell. The surface of individual or clusters of silicon nanoparticles is coated with a nanoparticle passivation film. Contact holes to emitters of the solar cell are formed by impinging a laser beam on the passivated silicon nanoparticles. For example, the laser contact process may be a laser ablation process. In that case, the emitters may be formed by diffusing dopants from the silicon nanoparticles prior to forming the contact holes to the emitters. As another example, the laser contact process may be a laser melting process whereby portions of the silicon nanoparticles are melted to form the emitters and contact holes to the emitters.
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