Method of adhering hard silicone resin, method of adhering substrate having fine structure, and preparation method of micro fluidic device utilizing adhesion method

摘要

A method for adhering a major substrate to which nano sized concave and convex structures are formed without damaging the concave and convex structures can be used in a production method of a microfluidic device including nano sized fluidic channels. The substrates may be adhered under heat free and adhesive agent free environment by exciting the substrate surface including hard silicone resin with atmospheric plasma or vacuum ultraviolet light, then juxtaposing and pressurizing the surface of the hard silicone resin substrate and glass substrate. The silicone rubber composition is applied on the contact face of the cover substrate and then the silicone rubber composition is cured to form the silicone rubber layer and then the ultraviolet light is exposed under the condition that the surface of the major substrate being formed with concave and convex structures is contacted closely to the silicone rubber layer of the cover substrate.