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Piezoelectrically actuated magnetic-field sensor

机译:压电致动磁场传感器

摘要

A magnetic-field sensor that provides an output signal in response to an external magnetic field is described. This magnetic-field sensor includes a pair of cantilevers separated by a horizontal gap, which is displaced vertically over an open cavity by applying a time-varying voltage having a fundamental frequency across piezoelectric layers in the pair of cantilevers. The pair of cantilevers also includes magnetic-flux concentrators that convey the external magnetic field to the horizontal gap between the pair of cantilevers. A stationary magnetoresistive sensor in the horizontal gap transforms the external magnetic field into an output signal. Because the pair of cantilevers is displaced vertically at the fundamental frequency, the output signal includes a modulation signal corresponding to the external magnetic field centered around twice the fundamental frequency. This modulation of the external magnetic field allows 1/f noise to be suppressed, thereby improving the sensitivity of the magnetic-field sensor.
机译:描述了一种响应于外部磁场而提供输出信号的磁场传感器。该磁场传感器包括由水平间隙隔开的一对悬臂,该悬臂通过在该悬臂对中的压电层上施加具有基频的时变电压而在敞开的空腔上垂直移位。该对悬臂还包括磁通量集中器,其将外部磁场传送到该对悬臂之间的水平间隙。水平间隙中的固定磁阻传感器将外部磁场转换为输出信号。因为一对悬臂在基频上垂直移动,所以输出信号包括与以基频两倍为中心的外部磁场相对应的调制信号。外部磁场的这种调制允许抑制1 / f噪声,从而提高了磁场传感器的灵敏度。

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