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Nanostructure field emission cathode structure and method for making

机译:纳米结构场发射阴极结构及其制备方法

摘要

Various embodiments are described herein for nanostructure field emission cathode structures and methods of making these structures. These structures generally comprise an electrode field emitter comprising a resistive layer having a first surface, a connection pad having a first surface disposed adjacent to the first surface of the resistive layer, and a nanostructure element for emitting electrons in use, the nanostructure element being disposed adjacent to a second surface of the connection pad that is opposite the first surface of the connection pad. Some embodiments also include a coaxial gate electrode that is disposed about the nanostructure element.
机译:本文描述了纳米结构场发射阴极结构及其制造方法的各种实施方案。这些结构通常包括电极场发射器,其包括具有第一表面的电阻层,具有与电阻层的第一表面相邻设置的第一表面的连接焊盘,以及用于在使用中发射电子的纳米结构元件,该纳米结构元件被设置。邻近于连接垫的第二表面的第二表面。一些实施例还包括绕纳米结构元件布置的同轴栅电极。

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